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fe77021金蟲 (小有名氣)
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【請(qǐng)教】請(qǐng)教掃描電鏡調(diào)焦問題 已有28人參與
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SEM資料匯編 |
金蟲 (小有名氣)
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fe77021, Yes, most of the above comments are helpful. Make sure that you have good conductivity as much as you can. If you are using conductive carbon tape to secure your sample, you can add some silver/carbon paint at the edge of the sample to provide better conductivity. You can even use the 0.5kV on Hitachi s-4800. This is the beauty of the s-4800. Not only that, you can change the beam current. Most of the time Ie=15-20mA are used. However, for your samplle, I will recommend that you can even reduce to 2-5mA to reduce the beam current/heat to avoid overheat/shift your sample. Lower down the working distance (WD) will give you better resolution. One more thing, you can change the pixels of the photo to enhance the image quality (1280 button vs 2560 button). After saying all of these, I would say the most important issues are the alignment and astigmatism control. You might think you already adjusted the stigmators correctly but they are not. After adjusting the focus, you need to go back to adjust the stigmators again, back and forth between the "focus and stigmators-x, y" a few times. If everything is correct, you will suddenly see a focused image since the stigmators are perfect. Give me your e-mail address I can provide you a brief outline of the operating procedures on s-4800. I think it will help you in the long run if you just started to learn how to use the s-4800. Good luck. |
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