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[資源]
Thin Film Analysis by X-Ray Scattering
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Thin films have become an important branch of materials science and technology over the last few decades. A thin film is considered in this book as having a thickness between about 1 nm and some 10 μm. Their first application was probably in the field of decorative coatings, but in the last century many other applications in microelectronics, optics, data storage, sensorics, protection and other purposes have had a large impact on the development of thin films and related deposition techniques. Figure 1 displays a variety of thin-film applications from the areas mentioned. Depending on the intended application, thin films are made of metals, inorganic compounds, organic compounds or from biological molecules. The task of the thin-film developer is easily described by stating that the deposition process has to be optimized such that the arrangement of atoms enables the film to fulfill the intended functionality. Since structure and function are intimately related properties in any material, the characterization of structural properties is a very relevant issue in thin-film development. This book is concerned with the structural analysis of thin films by x-ray scattering procedures. There exist various other characterization techniques like electron microscopy, scanning tunneling methods, ion beam scattering, magnetic resonance, optical spectroscopy and others by which important structure properties may be elucidated. Here, however, the focus is on x-ray scattering. The suitability of this technique for thin-film analysis is mainly motivated by two reasons: 1. The wavelengths of x-rays are of the order of atomic distances in condensed matter, which especially qualifies their use as structural probes. 2. X-ray scattering techniques are nondestructive and leave the investigated sample or – more importantly – the produced device intact. Electron microscopy might be considered of comparative importance for the characterization of structure and morphology. This technique is a complementary one to x-ray scattering, since it probes a rather confined volume of the sample, whereas x-ray scattering yields information from a much larger volume. Therefore, some micrographs from electron microscopy will appear in the text, but the reader is referred to the special literature for an introduction to the subject. |
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2014-11-01 00:22:22, 4.63 M
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